Clean Room

Clean Room

保有クリーンルーム

Clean Room

Clean Room North Building 1F

ClassUSA Fed.Std.209E 10000
(ISO Class7)
Room Size【CR1】
W8.0m×D24.0m×H3m
Building Area:192m³
【CR2】
W7.0m×D13.4m×H2.9m
Building Area:93.8m³
Frontage【CR1】
W2.7m×H2.7m
【CR2】
W1.7m×H2.6m
Floor Loading Carrying Capacity1t/m²
Utility【CR1】
・Production power supply
・Production coolant
・Production exhaust (for vacuum pumps)
・D-Air
・N2(supply cylinder)
【CR2】
・Production power supply
・Air

Clean Room South Building 1F

ClassUSA Fed.Std.209E 1000
(ISO Class6)
Room SizeW8.2m×D16.8m×H3m
Building Area:137.7m³
FrontageW2.0m×H2.7m
Floor Loading Carrying Capacity1t/m²
Utility・Production power supply
・Production coolant
・Production exhaust (for vacuum pumps)
・D-Air
・N2(supply cylinder)

Clean Room S1 Factory

ClassUSA Fed.Std.209E 10000
(ISO Class7)
Room SizeW24.5m×D39.5m×H9.3m
Building Area:967.7m³
FrontageW5.4m×H4.9m
Floor Loading Carrying Capacity4t/m²
Utility・Production power supply
・Production coolant
・Production exhaust (for vacuum pumps)
・D-Air
・N2(supply cylinder)
Other FacilityCrane10t × 2
Crane height 6.5 m